The present paper is focused on the theoretical and experimental analysis of a three-axes MEMS gyroscope, developed by ST Microelectronics, implementing an innovative feedforward PI quadrature compensation architecture.
Modeling of a three-axes MEMS gyroscope with feedforward PI quadrature compensation
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Description
Authors: D. Marano, A. Cammarata, G. Fichera, R. Sinatra & D. Prati
Chapter
First Online: 03 September 2016
Abstract
The present paper is focused on the theoretical and experimental analysis of a three-axes MEMS gyroscope, developed by ST Microelectronics, implementing an innovative feedforward PI quadrature compensation architecture. The gyroscopes structure is explained and equations of motion are written; modal shapes and frequencies are obtained by finite element simulations. Electrostatic quadrature compensation strategy is explained focusing on the design of quadrature cancellation electrodes. A new quadrature compensation strategy based on feedforward PI architecture is introduced in this device to take into account variations of device parameters during lifetime. Obtained results show a significant reduction of the quadrature error resulting in a improved performance of the device. Fabrication and test results conclude the work.
